【摘要】 采用甚高频等离子体增强化学气相沉积(VHF-PECVD)技术制备了不同硅烷浓度系列的微晶硅电池。结果表明:电池的开路电压随着硅烷浓度的增大而逐渐增加,而电池的短路电流则先增加后减小,在转折点电池的效率达到最大,填充因子则变化不明显;(220)择优取向出现,I(220)/I(111)比值大,电池的短路电流密度也大,电池的效率也最高;在实验的范围内,电池的短路电流密度和厚度成正比例关系;首次在国内制备出了效率达7.3%,短路电流密度(Jsc)为21.7mA/cm2,开路电压(Voc)为0.52V,填充因子(FF)为65%的微晶硅电池。更多还原

【Abstract】 Series of microcrystalline silicon solar cells were prepared at different silane concentrations（SC）.The results showed that open circuit voltage(V_oc) increased with increasing SC,however short maximum circuit current density(J_sc) at SC=5.5%,which reaches maximum conversion efficiency of solar cells.Fill factor almost has no chang with the variation of SC.J_sc increases with increasing thickness of solar cells in the experiments.Microcrystalline silicon solar cell with conversion efficiency 7.3% was fabricated(J_sc=21.7mA/cm²,V_oc=0.52V,FF=65%).更多还原