【摘要】 该文提出了一种新的高频复磁导率的测试方法。首先确定E4991A射频阻抗／材料分析仪的测量原理为单线圈法,在此基础上推导出了测量有衬底磁性薄膜复磁导率所适用的公式。在实际测试过程中,将衬底放入夹具中作夹具短路补偿,减小了由衬底带来的误差;通过反复验证,弄清了系统提供的阻抗值表示的意义,并据此对磁导率的计算公式进行了修正,最后给出了磁性薄膜复磁导率的测量结果。实验表明,该方法简便易行,所得数据与文献中同类薄膜的测量数据基本符合。更多还原

【Abstract】 This paper described a novel method for high -frequency complex permeability measurement. First, the theory for Agilent E4991A RF Impedance/Material Analyzer measurement, one -turn coil method, was studied. On the bases of this, formula of magnetic thin- film with substrate is derived for complex permeability calculation. At operating procedure, we put the substrate in the jig and did short compensation, decreasing the error introduced by it. We also found out the meaning of the impedance the system provided after proving. Formula for permeability calculation was thus modified. In the end, measurement result was presented. Operation of the method was eas-y, and the result was in coherence with that of similar thin - film from relevant papers.更多还原