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正性小分子光刻胶的制备探索
Study on Prepare of Positive Micromolecule Photosensitizer
【摘要】 以硬脂酸、邻硝基苄醇为原料,合成了硬脂酸邻硝基苄酯,并在高压汞灯下曝光、显影,证明了以邻硝基苄醇作为光敏基元制备正性小分子光刻胶的可行性。
【Abstract】 Stearic acid 2-nitrobenzyl esters is synthesized with stearic acid and 2-nitrobenzyl alcohol.Then it is exposured under HP mercury lamp and developed by 20% NaOH solution,which proves the feasibility of preparing positive micromolecule photosensitizer using 2-nitrobenzyl alcohol as photosensitive module.
【关键词】 硬脂酸;
邻硝基苄醇;
正性小分子光刻胶;
【Key words】 stearic acid; 2-nitrobenzyl alcohol; positive micromolecule photosensitizer;
【Key words】 stearic acid; 2-nitrobenzyl alcohol; positive micromolecule photosensitizer;
- 【文献出处】 四川理工学院学报(自然科学版) ,Journal of Sichuan University of Science & Engineering(Natural Science Edition) , 编辑部邮箱 ,2006年02期
- 【分类号】TN405
- 【被引频次】1
- 【下载频次】195