【摘要】 采用《SS6284》方法测定高浓度硅时,磷的存在会带来较大误差。为消除该方法的缺陷进行了系列试验。结果表明,调整条件试剂的加入量可消除这种误差,改进后的方法准确度和精密度较好。更多还原

【Abstract】 At the time of measuring high concentration silicon, the existence of phosphor can result in a larger error. In order to eliminate defects of the said method, a series of test have been carried out. Results show that the adjustment of added dosage for conditioning agent can eliminate the said error. After improvement, the said method to have better accuracy and precision.更多还原