【摘要】 试验研究了低粘度蒸馏水和硅油在内径13~100μm,长度40~100mm的微圆管道中的低压流动,测量了流动的流量-压力特性。研究结果表明,对于内径20μm、50μm和100μm的微圆管道,其流动特性与常规流动基本吻合;对于内径13μm的微管道,长度较短时的流动规律与常规流动相吻合,长度为100mm时的流量达到N-S方程预测值的3.93倍,表明此时出现了明显的尺度效应,管道内壁出现速度滑移致使流量增大。更多还原

【Abstract】 Microflow technology has been widely used in MEMS, the performance of MEMS determined by the microflow characteristics. The micron round channel with inside diameter 13～100 μm, length 40～100 mm was used for experiment. The low pressure flow of the light body distilled water and silicon oil was investigated. The characteristics of flow rate-pressure were evaluated. Findings indicated that for the micron round channel with inside diameter 20 μm, 50 μm and 100 μm, its flow characteristics fit close to the normal flow. As for the micro round channel with inside diameter 13 μm, when its length is short, the flow has a close agreement with the normal flow, but when its length comes to 100 mm, the flow rate is 3.93 times more than the predicted value of N-S equation. This showed that size effect appeared. Simultaneously, apparent fluid slip appeared in the wall of the channel, and the flow rate increased consequently.更多还原