【摘要】 采用有限元法对材料为SCR500的飞秒激光双光子成型点力学性能进行建模及仿真计算,得出了不同弹性模量下成型点与探针之间的作用力．进而利用原子力显微镜接触模式,选用无针尖探针,测量了成型点的力学性能,得出了相同位移载荷下成型点与探针之间的作用力．将测量结果和仿真结果进行比较,推算出成型点的弹性模量．分析结果表明,双光子固化成型点的弹性模量大约为宏观材料弹性模量的1／7．这为进一步研究双光子飞秒激光加工微器件的力学性能提供了基础．更多还原

【Abstract】 The single voxels mechanic property of material SCR500 is modeled and simulated by finite element analysis (FEA). The cantilever-voxels interaction force of variety elastic modulus is achieved. By measuring the mechanic property of single voxels with contact model of atomic force microscopy (AFM) and tipples cantilever, the cantilever-voxels interaction force in the same displacement is acquired. By comparing the measurement result with the simulation, the elastic modulus of single voxels is calculated. The result indicates that the elastic modulus of single voxels is about 1/7 of elastic modulus of macro sample,which provides basic theory to improve the mechanical properties analysis of micro-devices made by two photon femtosecond laser fabrication.更多还原