【摘要】 针对用于透射电镜观察的截面样品制备较为困难的问题,以不锈钢基底上沉积的VN／SiO2超晶格薄膜为例,介绍了薄膜截面TEM样品的制备方法与过程。更多还原

【Abstract】 Cross-sectional TEM observation can be used as a very useful method in the investigation of microstructure of thin films. However, the sample preparation for cross-sectional TEM observation is generally regarded as a challenging task. In this paper, we discussed the preparation of TEM cross-sectional samples in a step-by-step approach designed to enable a competent experimentalist to reproduce the technique. An example from VN/ SiO2 superlattice is discussed correspondingly.更多还原