【摘要】 使用氩离子激光作为光源,乙烷(C2H6)作为工作气体,在激光功率0.5~4.5 W,气体压力0.03~0.09 MPa的变化范围内,进行激光诱导化学气相沉积形成微结构。试验研究了激光功率、气体压力对碳柱直径和生长长度的影响,讨论了碳柱平均生长率随照射时间、焦点移动速度的变化规律。根据实验数据,使用焦距移动方法,生成长径比超过500的微碳柱。更多还原

【Abstract】 With argon ion laser as the induced light source and ethane（C₂H₆） as the precursor gas,laser induced chemical vapor deposition were proceeded for fabrication of micro carbon pillar in the variety ranges of laser power from 0.5 to 4.5 W and the pressure of the precursor gas from 0.03 MPa to 0.09 MPa.The influence of laser power and gas pressure on the diameter and length of micro carbon pillar were investigated.The changes of averaged growth rate of carbon pillar with the laser irradiation time and moving speed of focus were discussed.Based on experimental data,the micro carbon pillar with an aspect ratio of over 500 was fabricated through focus moving method.更多还原