【摘要】 为了使RF离子源具有良好的引出特性,测试了吸极几何参数、振荡器板压、引出电压对离子源引出特性的影响,对实验结果进行了分析．在其他参数不变的情况下,存在最佳的D/d；增加D/d,有利于过聚焦的离子束恢复聚焦状态．b/D增大时,聚焦度上升,引出束流下降．B/d减小时,聚焦度增大；当B/d小于4时,聚焦度增加趋势变缓．综合考虑聚焦度、引出束流和气压,D/d,b/D,B/d适宜的选择范围分别为1．6—2．1,0．7—1．1,4—7．改变引出电压和振荡器功率对离子源性能的影响具有相反的方向,两者都存在最佳工作点．更多还原

【Abstract】 Effects of geometry parameters of extraction electrode,extraction voltage and oscillator power on the extraction property of RF ion source are measured and the experimental results are analyzed.It turns out that the RF ion source has a good extraction property.There is the best Did on condition that other parameters don’t change.The D/d rising is beneficial to the ion beam focusing from over focusing.Focusing degree increases and extraction beam intensity drops with b/D increasing.Focusing degree rises with B/d decreasing and the rising tendency slows down when B/d is smaller than 4.The suitable ranges of D/d,b/D and B/d are respectively 1.6—2.1,0.7—1.1 and 4—7 when considering comprehensively the focusing degree, the extraction beam intensity and the pressure.Change of extraction voltage and oscillator power has opposite effect on the ion source performance and they have respectively best operation values.更多还原