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La_0.5Sr_0.5CoO₃薄膜的制备及其湿敏性质的研究

Preparation and Humid Sensitivity Studies of La_0.5Sr_0.5CoO₃ Film

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【Author】 WANG Jian-lu~1,PENG Ju-bo~1,CAI Yi~2,PU Chao-guang~2,ZHANG Peng-xiang~1(1.Institute of Advanced Materials for Photo-Electronics,Kunming University of Science and Technology,Kunming 650051,China;2.Kunming Institute of Physics,Kunming 650223,China)

【机构】昆明理工大学光电子材料研究所；昆明物理所；昆明理工大学光电子材料研究所云南昆明650031；云南昆明650031；云南昆明650223；

【摘要】利用脉冲激光沉积(PLD)的方法,在SiO2/Si衬底成功制备了钙钛矿结构的La0.5Sr0.5CoO3薄膜.对制备的薄膜生长的薄膜进行了XRD测量分析,并且对薄膜的表面形貌进行了测量分析.着重对薄膜的电阻进行了测量,发现环境气氛对电阻的影响,进而对薄膜湿敏电阻进行了测量.更多还原

【Abstract】 La_0.5Sr_0.5CoO₃ films have been deposited on SiO₂/Si subtracts successfully by the Pulse Laser Deposition.Then the XRD and SEM of La_0.5Sr_0.5CoO₃ films have been measured and analyzed.In particular,measuring the resistance of the film reveals that the environment has influence on the resistance.So the humidity sensitivity resistance of the LSCO films is measured.更多还原