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高频振动外差激光干涉仪研究
Research of Heterodyne Interferometer of High-frequency Vibration
【摘要】 光外差激光干涉测量技术具有非接触、超高灵敏度的优点,用于微小振动的测量有独特的优势。采用外差激光干涉技术,结合正交正弦逼近法,在国家高频基准振动台上实现了纳米级的振动位移和相位测量。
【Abstract】 Based on the non-contact and super-sensitivity of the heterodyne interfere technique, and its particular advantage at minuteness vibration test, we set up a heterodyne interferometer and use the sine-approximate method, and got the nanometer level displacement and phase shift measurement of high-frequency vibration at the national standard device.
【关键词】 外差干涉仪;
正弦逼近法;
振动测量;
相位移;
【Key words】 heterodyne interferometer; sine-approximate method; vibration measurement; phase shift;
【Key words】 heterodyne interferometer; sine-approximate method; vibration measurement; phase shift;
- 【文献出处】 科技导报 ,Science & Technology Review , 编辑部邮箱 ,2006年11期
- 【分类号】TH744.3
- 【被引频次】6
- 【下载频次】371