【摘要】 基于电化学腐蚀原理加工微机械加工中使用的微圆柱体,对微细圆柱体成形的机理进行详细的分析。通过对腐蚀过程进行理论建模,利用对电压和腐蚀时间的控制来决定腐蚀后微圆柱体成形的形状以及圆柱体直径尺寸大小。同时,对影响微圆柱体成形的试验参数进行详细的分析,如对电压的控制、电流的变化、电解液浓度的影响、腐蚀时间决定的微圆柱体直径大小等,最后得出微圆柱体成形的规律。理论模型计算结果与试验结果进行比较,证明了理论建模的正确性。利用此种方法试验加工出总长1 180μm,前端较细处长300 μm,直径6μm的钨微细圆柱体结构,长径比达到50:1,并可以在微细加工作为工具电极使用。更多还原

【Abstract】 Based on electrochemical principle, the micro-pin used in micro-machining is fabricated. The shaping mechanism of the micro-pin is analyzed in detail. A model about the proc-ess of electrochemical etching is developed. The shape and the diameter of the micro-pin are controlled by precisely determin-ing voltage and time. At the mean time, various parameters that affect the results of experiment are discussed in detail, which include controlling of voltage, current changing, concentration of the electrolyte and effect of time of etching on the diameter of micro-pin etc. The law of micro-pin forming derived from the discussion. The comparison between experiment and theory proves the validity of theory model. Ultimately, a tungsten mi-cro-pin of total long with 1 180 μm are prepared, with which the thinner part of front is 300 μm in length and 6 micrometer in diameter, the aspect ratio is 50:1. The micro-pin could be used in micro machining.更多还原