【摘要】 多丝切割是一种新兴的硅片切片加工方法,在硅片的多丝切割加工中,金属丝的张力控制是影响加工的重要因素,本文分析了多丝切割机走丝系统的特点,采用张力控制电机实现走丝系统的速度差张力控制。仿真结果表明该方法可以满足走丝系统张力控制的高精度、高响应速度、波动小的控制要求。更多还原

【Abstract】 Multi-wire sawing is a novel method for slicing silicon.The tension control of wire is a vital factor that has impact on the slicing process.This paper analyzed the features of the wire-running system of a multi-wire saw,and tension control motors were employed to control the speed-discrepancy tension.Simulation results show that the method can meet the system′s requirements of higher precision,higher response speed and lower fluctuation.更多还原