【摘要】 提出了一种利用气缸推力对竖直方向运动的超精密运动平台进行配重的新方法,使电机趋动力减小,提高运动精度。建立了重物配重及气动配重的力学模型,指出重物配重时,电机的推力至少要能够克服摩擦力,而用气动配重方法,当平台运动方向发生变化时,改变气缸压力,使平台在垂直运动时所需的电机推力小,甚至达到零负载,使其运动精度得以提高。并给出了一种控制气缸推力的解决方案。更多还原

【Abstract】 A pneumatic counterbalance method for a super-precise vertical motion stage is adopted for decreasing the drive force and increasing the motion precision of a motor.The mechanics models of gravity counterbalance and pneumatic counterbalance are set up.For gravity counterbalance,the drive force of the motor should be at least larger than its friction force.But for pneumatic counterbalance,its drive force can be smaller or even down to zero when the pressure of the motor′s gas cylinder changes as the motion direction of the stage changes into vertical motion.Thus,its motion precision is improved.A solution that uses the control of the drive force of a gas cylinder is proposed.更多还原