【摘要】 针对主体为圆锥、尖端为球冠的扫描探针针尖物理模型,提出了针尖与试样之间等效电场分布假设,基于该假设导出了二者之间静电力的解析模型,分析了针尖结构参数与静电力间的关系.模拟计算结果和数值计算结果一致,并与相关的实验结果吻合,证实了电场分布假设的合理性.更多还原

【Abstract】 A hypothesis on electrical field distribution is presented for the physical model of a scanning probe tip with a conical body ending in a spherical apex.Based on the hypothesis,we deduced an analytical model to calculate the electrostatic force acting on the tip and analyzed variation of the electrostatic force with structural parameters of the tip.The simulation results are consistent with those given by numerical methods of equivalent charge distribution(ECD) and by experiments.The hypothesis is proved reasonable according to the work.更多还原