【摘要】 对扫描探针显微镜中的单管压电执行器在x-y平面扫描的电压-位移特性进行了物理和数据分析,提出了一种基于采集数据和Matlab数值计算的建模方法。经过大量的实验数据的统计分析,充分考虑了扫描速度、扫描角度、非正交和耦合误差因素对单管压电扫描器模型误差的影响,建立的模型的数学表达式在形式上表现为二项式叠加各种误差表达式。基于此模型推导出了单管压电扫描器的非线性校正的数学表达式,通过计算机仿真软件Matlab对其进行了仿真研究。仿真实验证明建立的模型能有效的消除各种误差。该方法避免了建模时对压电陶瓷内部机理(极化等)的分析,使模型参数的个数降低到很少,是一种在工程实践中非常实用的建模方法。更多还原

【Abstract】 A new modeling method based on sample data is described in this paper,through physics and sample date analysis on displacement vs.voltage characteristics of x-y plane of cylindrical piezoelectric scanner used in scanning probe microscope(SPM).Through sample data statistical analysis,and considering the error factors such as scan speed,scan angle,nonlinearity and coupling,a model represented by a binomial plus some error expressions is constructed.A nonlinearity correction expression based on the model is deduced.With the software Matlab this nonlinearity correction is simulated.The result of simulation indicates that it can eliminate the errors effectively.The ascendency of the method is that there are no polarization mechanism analysis and fewer number of model parameters.The method is practical applied to engineering.更多还原