【摘要】 研究了不同厚度的纳米Al膜在2~18GHz频率的介电特性。结果表明:纳米Al膜的介电常数具有尺寸效应,并在33nm时出现极值。薄膜的介电常数随电磁波频率的变化而变化。纳米Al膜直流电导率的实验结果,证明了薄膜结构变化是导致介电常数随厚度变化的直接原因。更多还原

【Abstract】 The relationship between permittivity and thickness of nano aluminum films in microwave band were investigated.The results indicate that the permittivity of the aluminum films have size effect,and reach the maximum at thickness of 33nm.The structure plays a key role in the size effect of permittivity of the films.更多还原