【摘要】 利用新型中频对靶磁控溅射在硅和M2高速钢基体上沉积了一系列无氢含铬类金刚石膜。考察了类金刚石膜的表面形貌、显微结构、硬度、结合力和摩擦磨损性能。结果表明:合成的类金刚石薄膜具有优良的综合性能,硬度为30-46GPa、结合力Lc达50-65N、大气环境下摩擦系数约为0.1。更多还原

【Abstract】 The hydrogen-free diamond-like carbon(DLC) films were deposited on substrates of Si and M2 high-speed steel using a new mid-frequency dual-magnetron sputtering.The microstructure and properties of DLC film including surface morphology,hardness,adhesion,friction and wear behavior were investigated.The results indicate that the films have good comprehensive performance,i.e.,high hardness of 30～46GPa,good adhesion of critical load 50～65N,and friction coefficient about 0.1 in air condition.更多还原