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光学式颗粒计数装置的研制
Development of Optical Small Particles Counting Device
【摘要】 设计了一种检测装置,用来对洁净介质中的颗粒粒径大小和数量进行统计。详细分析了用几何光学的光阻公式替代消光公式对大粒径颗粒的检测机理和前向光散射探测器检测小粒径颗粒时的计数技术。用该装置对标准颗粒物质进行了检测实验,结果表明:对于2μm以上的颗粒计数,效率能达到90%;对于1μm以下的颗粒也有较好的分辨能力,计数效率在70%左右。数值计算和实验结果证实了该装置具有较好的计数能力,能够表征洁净介质的污染程度。
【Abstract】 A measurement device is designed for detecting the diameter and number of small particles in a clean media,its counting mechanism based on light-blockage and extinction theory and the employing technology of near forward light scattering are analyzed in detail.Numerical calculations and experiment results showed that the device has a good counting capability,its counting efficiency can reach 90 % for particles above 2?μm and also reach 70 % for particles below 1?μm.This device could analyze contamination degree of clean media and can be used in the field of environment monitoring.
【Key words】 Metrology; Particle counting; Extinction coefficient; Light scattering;
- 【文献出处】 计量学报 ,Acta Metrologica Sinica , 编辑部邮箱 ,2006年01期
- 【分类号】TH724
- 【被引频次】4
- 【下载频次】201