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飞秒激光烧蚀玻璃基质金属薄膜直写衍射光栅

Inscribing Diffraction Grating by Femtosecond Laser Ablation of Metal Film on Glass Substrate

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【作者】 胡晓赵全忠姜雄伟邱建荣朱从善

【Author】 HU Xiao,ZHAO Quan-zhong,JIANG Xiong-wei,QIU Jian-rong,ZHU Cong-shan(Photon Craft Project,Shanghai Institute of Optics and Fine Mechanics,The Chinese Academy of Sciences,Shanghai 201800,China)

【机构】 中国科学院上海光学精密机械研究所中国科学院上海光学精密机械研究所 上海201800上海201800

【摘要】 提出了一种新的制备光栅的方法,利用800 nm的飞秒激光扫描蒸镀在石英玻璃衬底表面的金薄膜,通过烧蚀金薄膜在衬底表面形成衍射光栅。用波长为532 nm的激光照射光栅,测量其一级衍射效率,测得的衍射效率最高为6.98%。通过改变激光扫描速度、激光功率、光栅周期等实验参数研究其对制备的光栅的一级衍射效率的影响,结果表明,降低激光扫描速度,减小光栅周期,或增加激光功率都能提高制备光栅的一级衍射效率。

【Abstract】 A new method of inscribing diffraction gratings by using a focused near-IR 800 nm femtosecond laser ablating gold film on glass substrate was reported.The first-order diffraction efficiency of the grating was measured using a 532 nm laser,the highest of which was 6.98%.Through changing the experimental parameters such as the laser scanning speed,the laser power and the grating period,the effects of these parameters on the diffraction efficiency of the gratings were studied.The experimental results showed that decreasing the laser scanning speed and the grating periods,or increasing the laser power,raised the first-order diffraction efficiency of the gratings,and the mechanisms were analyzed briefly.In addition,a new method of fabricating nano-ribbons by femtosecond laser was presented.

【基金】 国家自然科学基金(50125208,60377040);中国博士后科学基金和王宽诚教育基金资助项目
  • 【文献出处】 中国激光 ,Chinese Journal of Lasers , 编辑部邮箱 ,2006年01期
  • 【分类号】O436.1
  • 【被引频次】13
  • 【下载频次】443
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