【摘要】 基于ANSYS软件模拟设计了单元镜面面积为60×60μm2的32×32元微反射镜阵列,其工作频率可达到30KHz,最大扫描偏转角度为±10°,响应时间少于30μs。同时提出了一种基于表面薄膜工艺的加工方法,成功制作了该32×32元的微镜阵列,并进行了初步测试。更多还原

【Abstract】 Based on a finite moment simulation with ANSYS software,a 32×32 micromirror array with pixel area of 60×60μm~2 was designed.The simulation has shown that the work frequency of micromirror array is reached to 30KHz,and the maximum deflection angle is±10°,while the response time can be less than 30 μs.A surface-micromachined process has been experimentally established and the micromirror array was successfully fabricated.An initial result for deflection angle measurement is given.更多还原