【摘要】 纳米金刚石薄膜的优异性能吸引了众多学者的关注,同时也成为CVD金刚石薄膜研究领域的新热点。文章对国内外的纳米金刚石膜制备的研究状况做了详细介绍,并对纳米金刚石薄膜的应用进行了讨论。更多还原

【Abstract】 The excellent properties of nanocrystalline diamond films are of interest for many researchers and have become a new hot point in the development of diamond films prepared by chemical vapor deposition. The review is presented of the development of nanocrystalline diamond films at home and abroad. The application of them is discussed.更多还原