【摘要】 用1.06μm连续激光辐照TiO2/S iO2薄膜元件,在不同强度下测量了激光辐照TiO2/S iO2薄膜元件引起反射信号幅度随时间的变化,并观察到薄膜从基体材料表面起泡、膜层脱落的现象。研究结果表明,TiO2/S iO2薄膜的反射光信号变化是连续激光辐照薄膜元件产生的热效应引起的;在激光辐照过程中,薄膜元件基体材料产生的热变形差别是基体起泡、脱落的主要原因。更多还原

【Abstract】 When TiO₂/SiO₂ film is irradiated by difterent 1.06μm CW-Nd∶YAG laser radiation,the time history of the signal reflected from the TiO₂/SiO₂ film is measured till a number of foam and pull-off phenomenon on the TiO₂/SiO₂ film surface is observed.The test results indicate the variation of the reflected signal is caused by thermal effect due to laser irradiation and during the laser irradiation,the difference of thermal deformation of the TiO₂/SiO₂ film and substrate is the main cause of the foam and pull-off phenomenon.更多还原