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提高差拍法布里-珀罗干涉仪测量精度的研究
The Study of Improving on Measured Precision of Heterodyne Fabry-Parot Interferometer
【摘要】 文章在中国计量科学研究院研制的差拍法布里-珀罗(F-P)干涉仪基础上,提出用密封干涉光路的真空系统方法,来消除空气折射率变化对测量结果的影响。研究了空气折射率变化对测量精度的影响关系,给出真空系统所需的真空度的估计式。并设计制作了适用于该系统的密封干涉光路的真空系统。
【Abstract】 In this paper,a novel way based on NIM’s heterodyne Fabry-Perot interferometer was put forward to avoid the effect of the change of air refractive index by airproofing the interference light path in vacuum.The influence of the change of air refractive index to the measured precision was studied,and the approximate formula of vacuum degree that vacuum system required was concluded.The vacuum system that adjusts the interference light path was designed and built.
【关键词】 纳米测量;
法布里-珀罗腔;
拍频干涉法;
空气折射率;
【Key words】 nanometer measurement; Fabry-Perot cavity; beat frequency interferometry; air refractive index;
【Key words】 nanometer measurement; Fabry-Perot cavity; beat frequency interferometry; air refractive index;
【基金】 国家自然科学基金重大国际(地区)合作研究项目(No.50420130479)
- 【文献出处】 激光与红外 ,Laser & Infrared , 编辑部邮箱 ,2006年04期
- 【分类号】TH744.3
- 【被引频次】13
- 【下载频次】360