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CO₂激光辐照下光学薄膜的热畸变研究

Experimental Study on Thermal Distortion of Thin Film Coatings Irradiated by CO₂ Laser

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【Author】 YANG Fu~1,NAN Jing-yu~1,ZHENG Wei~1,ZHANG Bin~2,HUANG Wei~3(1.Department of Physics,Hebei North University,Zhangjiakou 075028,China;2.College of Electronic Information,Sichuan University,Chengdu 610064,China;3.Institute of Optics & Electronics,Chinese Academy of Sciences,Shuangliu 610209,China)

【机构】河北北方学院物理系；四川大学电子信息学院；中国科学院光电技术研究所河北张家口075028；河北张家口075028；四川成都610064；四川双流610209；

【摘要】采用夏克-哈特曼波前传感器对不同基底材料、不同厚度单层光学薄膜以及不同膜系的多层光学薄膜样品在10.6μm激光辐照下的热畸变进行了实验研究。更多还原

【Abstract】 Using the Shack-Hartmann wavefront sensor,the thermal distortions of the different substrates,the single layer thin films with different thickness and the different optical thin films irradiated by CO₂ laser at 10.6μm wavelength were studied experimentally in this paper.更多还原