【摘要】 介绍了硅微静电梳状谐振器的静电驱动工作原理,重点提出了基于DSP芯片和DDS技术的智能驱动源系统设计框架。详细分析了数字电路部分的接口技术和模拟电路部分中的微弱信号检测技术。结合实验数据和扫频曲线,指出在不同真空度环境下谐振器的各种扫频方法。更多还原

【Abstract】 The working principle of silicon static electric micro-resonator is simply introduced.Based on DSP chip and DDS technology,a design frame for a new type intelligent driving generator is proposed.The interface method in digital circuitry part and the weak signal detection technique in analogy circuitry part are analyzed in detail.Combined with experiment data and scanning curves,several frequency searching approaches in different vacuum circumstance are presented.更多还原