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化学浴沉积法制备纳米氧化亚铜薄膜
Preparation of nano-Cu2O thin films using modified chemical bath deposition method
【摘要】 用改进后的化学浴沉积法制备了纳米Cu2O薄膜,并对成膜条件及膜的性能进行了研究.结果表明:化学浴沉积法改进后有利于制备高质量的纳米Cu2O薄膜;最佳反应温度为60~70℃,此温度范围内Cu2O薄膜的膜厚随着循环次数线性增加,制备的薄膜纯度较高,表面较平整和致密,Cu2O粒径为14~22 nm,其禁带宽度为2.01 eV.
【Abstract】 Cuprous oxide thin films have been deposited by modified chemical bath deposition method.Effects of some technological factors for Cu2O thin films deposition and properties of the films have been investigated.The results show that the modified chemical bath deposition method benefits the preparation of nano-Cu2O thin films with high quality and the optimal bath temperature is 6070°C.In such conditions,film thickness of high pure Cu2O increases linearly with number of cycles,the Cu2O films with diameters between 14 nm and 22 nm are in uniform,and the band gap of the films as prepared is 2.01 eV.
【Key words】 nano-Cu2O; chemical bath deposition method; modified; thin film;
- 【文献出处】 华中师范大学学报(自然科学版) ,Journal of Central China Normal University(Natural Sciences) , 编辑部邮箱 ,2006年01期
- 【分类号】TB383.1
- 【被引频次】28
- 【下载频次】1250