【摘要】 基于二氧化钒薄膜在约68℃半导体和金属间的可逆相变,通过控制温度来实现高透过率到高反射率的转换,实现对光的调制作用.通过表面微机械低热质单元来实现隔热,保证各单元在无串扰的情况下具有独立的开关功能.在工作过程中,单元的温度通过单元上的集成电阻或空间寻址热辐射源来控制.采用微机械工艺成功制备出32×32二氧化钒热光效应光调制器阵列,该热光效应调制器由于没有可移动的部件,其最大的优点就是高可靠性和低制造成本.更多还原

【Abstract】 The purpose of this research is to implement a micro-machined thermo-optical modulator based on the semiconductor-metal phase transition of thin film of vanadium dioxide （VO₂）, which undergoes a reversible phase transition at approximately 68℃. In the light modulator, this phase transition related optical switching by using surface micro-machined low-thermal-mass pixels was exploited to achieve good thermal isolations. Thus, each pixel was switched individually without cross talking. In operation, the pixel temperature was controlled by integrated resistor on each pixel or spatially addressed thermal radiation sources. The modulator was switched between high transmissions to high reflection by controlling the pixel temperature. The array consisting of 32×32 light modulators wihout moving parts were fabricated by a surface micromachinning process. The light modulator of thermo-optical effect shows its high reliability and easy to fabricate.更多还原