【摘要】 为了提高激光反射膜的光谱特性和抗激光损伤特性,提出了一种高损伤阈值激光反射镜的设计方法:采用HfO2-Nb2O5-SiO2多材料混合膜系结构,利用Nb2O5-SiO2折射率差值大的特点,在较少的膜层数下达到高反射率要求;利用HfO2-SiO2组合具有高的抗激光损伤特点,在Nb2O5-SiO2膜堆的最外部分叠加HfO2-SiO2膜堆,取长补短,做到采用较少的膜层数,达到高反射率要求,同时提高薄膜的抗激光损伤能力。该方法能灵活有效地按照不同膜系要求进行材料组合,具有很高的实用价值,达到工程最优化设计。更多还原

【Abstract】 To achieve high spectra performance and laser damage performance for the laser high ref-lectivity film,a design method of high performance laser film that ensures not only high reflectivity but also a high laser damage threshold is presented here.Three film materials:HfO2-Nb2O5-SiO2 were used to design the laser high reflectivity film.The high reflectivity requirement was attained by use of Nb2O5-SiO2 film stack because of the larger refractive index ratio.HfO2-SiO2 film stack was combined with Nb2O5-SiO2 film stack at the outside to improve the laser damage threshold for integer film stack.By using fewer film layers and lower material cost,the high reflectivity and high laser damage threshold for laser reflectivity film were simultaneously achieved.更多还原