【摘要】 利用有限元法对微桥结构的测辐射热计进行了二维热模拟.定量地分析了探测单元的大小尺寸、支撑层的厚度,支撑臂的长度和宽度、引线材料的选取等对微测辐射热计探测单元在红外辐射下温度的变化和热响应的快慢情况.评估了真空封装对微测辐射热计红外响应的影响.同时作为比较对平板空腔结构的红外探测器也进行了分析.更多还原

【Abstract】 Two-dimensional thermal simulations of the microbolometer with a micro-bridge structure by finite element method were done.The effects of pixel size,suspended film thickness,length and width of suspended leg,down-lead,vacuum package on the temperature changes and thermal time constants of pixels induced by infrared radiation were analyzed.To compare,the performance of microbolometer with a cavum structure was also discussed.更多还原