节点文献
非制冷焦平面探测器牺牲层制备工艺研究
Research on Sacrificial Layers Fabrication in Uncooled Infrared Focal Plane Array
【摘要】 研究了牺牲层制备的工艺过程。通过对牺牲层材料选择、牺牲层图形化及牺牲层固化等工艺技术的研究,获得了图形质量较好的牺牲层样品。建立了优化的牺牲层制备工艺制度,为探测器的后续研究奠定了基础。
【Abstract】 The processes of sacrificial layers fabrication were studied. By selecting photosensitive polyimide, micropatterning process and passivation of sacrifical layers, optimum processes of sacrificial layer fabrication were obtained, by which the sacrificial layers with excellent performances were acquired. The critical technologies of sacrifical layers fabriation are presented, which is the base of uncooled infrared focal plane array.
【关键词】 牺牲层制备；
微桥结构；
图形化；
光敏型聚酰亚胺；
【Key words】 sacrificial layers fabrication； micro-bridge structure； micropatterning； photosensitive polyimide；
【Key words】 sacrificial layers fabrication； micro-bridge structure； micropatterning； photosensitive polyimide；
- 【文献出处】 红外技术 ,Infrared Technology , 编辑部邮箱 ,2006年01期
- 【分类号】TN215
- 【被引频次】9
- 【下载频次】145