【摘要】 分析了电子工业对半导体硅材料的新要求。通过对不同表面状态的硅片力学性能的测试,得出化学腐蚀在改善硅片力学性能方面具有重要作用,适当的化学腐蚀工艺可以大幅减少硅片制备过程中的不良率。更多还原

【Abstract】 This paper analyzes the new demands of electronic industry for semiconductor Si material.By testing the mechanical characteristics of different surface of silicon wafer,chemical corrosion is found to be important to improve the mechanical characteristic of Si.It can largely reduce the defect ratio in IC manufacturing.更多还原