【摘要】 用CH4、NH3和H2为反应气体,利用等离子体增强热丝化学气相沉积系统在沉积有碳膜的Si上制备了碳纳米尖端.用扫描电子显微镜、原子力显微镜和Raman光谱表征了碳膜的结构,以及用扫描电子显微镜和X射线光电子谱表征了碳纳米尖端的结构,结果表明碳膜是凸凹不平的非晶碳膜,碳纳米尖端是由sp2结构的碳组成.根据有关离子的溅射和沉积机制,分析了离子轰击碳膜诱导碳纳米尖端的形成和生长.更多还原

【Abstract】 Carbon nanotips were prepared from a carbon film deposited on silicon by plasma-enhanced hot filament chemical vapor deposition using CH₄,NH₃ and H₂ as the reaction gases.The carbon film was characterized by scanning electron microscopy,Raman spectrometry and atomic force microscopy,and the carbon nanotips were characterized by scanning electron microscopy and X-ray photoelectron spectroscopy.The results indicate that the carbon film is an amorphous carbon film with grooves and spikes and the carbon nanotips are composed of sp² carbon.According to the mechanism related to ion sputtering and deposition,it was analyzed that the formation and growth of the carbon nanotips from the carbon film were induced by ion bombardment.更多还原