【摘要】 从理论上分析谐振器的静电制动特性和机械力学特性,给出了活动梳齿的谐振频率和谐振振幅的解析解,提供谐振器结构设计的依据。设计了四种结构形式的谐振器,充分考虑不同静电激励方式对谐振器的影响,合理选取结构参数,有效提高了谐振器抑制侧向失稳和粘附效应的能力。借助有限元软件在考虑硅微加工特性和可行性的基础上对谐振器模态和固有频率的仿真和计算,优化了谐振器结构参数,使工作模态远离其他高阶模态,具有良好的频率特性。更多还原

【Abstract】 We analysis the electro-static actuation and mechanical trait and get the analytical resolutions on resonant frequency and resonant amplitude of movable combs which supplies the basement of resonator design.Four resonator structures are designed with the consideration of different influence of different electro-static actuation on resonator.We select the key parameters reasonable and enhance the restrain efficient of side-instability and conglutination. FEA(finite element analysis) method was used to simulate and calculate the modal and natural frequencies with the consideration of the silicon micro machining property and feasibility.It reveals that the novel resonate accelerometer is characterized of high working condition through theoretical analysis and parameters optimization on entire structure.更多还原