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SiC纤维CVD涂层工艺研究
A Study of Preparation of Protecting Coating on SiC Filaments by CVD Process
【摘要】 对SiC纤维的CVD涂层工艺进行研究。实验发现采用BCl3,H2及CH4作为反应气体,采用与SiC纤维生产工艺相匹配的走丝速度并控制一定的工艺参数,在1350℃左右可得到厚度2~3mm且表面致密的B4C涂层,纤维涂层后性能基本保持不变。仅采用BCl3及CH4作为CVD涂层工艺反应气体,在1180-1250℃即可沉积出表面光滑致密,厚度2—3mm的富碳B4C涂层,涂层后纤维性能可提高10%左右,且涂层与纤维结合强度很高,优于B4C 涂层与SiC纤维的结合强度。实验还发现SiC纤维涂覆B4C及富碳B4C涂层后,能有效阻隔界面反应,可大幅提高 SiC/Ti基复合材料的性能。
【Abstract】 The coating of SiC filament prepared by CVD process was investigated. Test indicated that dense B4C protective layer about 2 ~ 3μm thick could be coated on SiC surface at about 1350 ℃ by using a gas mixture of H2 + CH4 + BCl3 and controlling the filament takeup speed matching the deposition process of SiC. The tensile strength of B4C-coated SiC fibres were basically unchanged in optimal parameter. Meanwhile, dense and smooth B4C-C coating with thickness of 2 ~3μm was also deposited on SiC surface at 1180 - 1250 ℃ by using a gas mixture of CH4 + BCl3. The results showed that the binding strength between B4C-C coating and SiC filament was better than that between B4C and SiC. At the same time, the tensile strength of SiC filament with B4C-C coating was increased of about 10% . Test also indicated that B4C or B4C-C coating could prevent the deleterious fiber-Ti matrix interface reaction and the tensile strength of titanium matrix composites reinforced by SiC filaments with B4C or B4C-C coating were significantly improved.
【Key words】 SiC filaments; B4C coating; B4C-C coating; CVD process;
- 【文献出处】 航空材料学报 ,Journal of Aeronautical Materials , 编辑部邮箱 ,2006年02期
- 【分类号】TG174.4
- 【被引频次】13
- 【下载频次】402