【摘要】 提出了利用气浮均化技术提高测量基准的设想,依照气体静压理论设计了300mm×400mm气浮测量板;并作了两种检测方法的对比检测试验。该技术提高了测量基准精度,消除了测量过程中的摩擦力,可极大地提高超精密工件的检测精度。更多还原

【Abstract】 To put forward the notion of employing air film’s character of averaging intensity of pressure to improve the precision of measuring benchmark,an air floated measuring flat based on the theory of air lubrication was designed.Its size is 300Х400.Two kinds of measuring experimentation was done and compared with each other.Air film’s character of averaging intensity of pressure improves the precision of measuring benchmark,and eliminates friction in the course of measurement.This method can improve the measuring precision of ultra precision workpiece.更多还原