【摘要】 为了将电火花加工技术应用到微机械制造中,分析了微细电火花加工中的关键技术,开发了微细电火花加工机床.该机床由精密进给装置、主轴、线电极磨削装置、微细电火花加工电源、花岗石工作台、伺服控制系统等构成.该机床具有三轴联动数控功能,各轴的进给分辨率均为0.1μm.主轴的回转跳动<1μm,转速为1 000~25 000 r/m in,可以连续变速.该机床小到可以放在一张桌面上.在这台机床上进行了初步工艺实验,稳定地加工出了直径<15μm的微细轴和25μm的微细孔,还加工出了微三维结构.更多还原

【Abstract】 In order to use electro discharge machining(EDM) technology to manufacture micro-machines,analyzed the key technologies of micro EDM,and developed a micro EDM machine tool.The machine tool is made up of precise feed stages,spindle,wire electrical discharge grinding(WEDG) device,pulse power supply of micro EDM,granite worktable,servo and control system and so on.It has the function of linked 3-axes NC.The feeding resolution of each axis is 0.1 μm.The rotation run-out of spindle is less than 1 μm.The rotation speed is 1 000-2 5000 r/min,and can be changed continuously.The machine tool can be placed on a desk.With the machine tool,some elementary experiments have been carried out.Micro rod less than 15 μm in diameter and micro holes with diameter of 25 μm were stably obtained.The 3D micro-configurations were also machined.更多还原