【摘要】 波导管均匀光束能量分布是一种经济实用、方便可行的方法,在激光LIGA(德文缩写:深度X射线光刻、电铸成模、微塑铸)、激光微成型等新兴领域有着重要的应用,然而关于波导管均匀准分子、固体激光光斑能量分布的理论研究还没有成熟可靠的方法.本文提出了一种基于经典光线传播的均匀光斑能量的简单模型,探讨了一维高斯光束经矩形波导管后的能量分布均匀性问题,得到了波导管均匀光斑能量的表达式,阐明了经矩形波导管后光斑横截面能量分布与透镜、波导管尺寸以及输出截面的关系,为实验中波导管的加工、实验设计提供了理论依据和指导.更多还原

【Abstract】 The wave-guide averaging excimer or solid laser energy distribution is a cheep and convenient method which was mostly used in Laser-LIGA,Laser-micro-Molding fields.However,there aren’t mature and reliable theories about the wave-guide averaging laser energy distribution.This paper presents a simple model based on the classical beam theory.We discuss the problem of the laser energy distribution when the laser beam was through the one-dimension rectangle wave-guide.We get the formula about the laser beam distribution and illustrate the relations between the laser intensity distribution and the sizes of the rectangle wave-guide,the focus length of the lens and the position of the laser beam output.It was hoped that this simple model can provide theoretical base to the processing of the rectangle wave-guide and the arrangement of the experiment.更多还原