【摘要】 在传统工艺的基础上,改变电极的形状可以提高氮化镓(GaN)基材料光导型紫外探测器的灵敏度·经过计算可知,虽然三棱形电极可以使探测器有效受光率提高100%,但工艺复杂,难以实现;而半圆柱形电极虽然使氮化镓薄膜有效受光率仅提高20%左右,但工艺简单,便于加工·更多还原

【Abstract】 Based on the conventional technology, the sensitivity of GaN-based Photoconductive Ultravidet Detectors is improved by changed electrode shape. According to theoretical calculation, the receivable ultravidet ray intensity of detectors with triangular and half-cylinder electrode is increased by 100% and 20% respectively, and half-cylinder electrode, to triangular electrode extremely difficult processed, be possessed of a simple and easy manufacturing technology.更多还原