【摘要】 从几何光学角度讨论了积分棒的匀光原理,介绍了积分棒在步进扫描投影光刻系统中的应用·分析了积分棒入射光束的数值孔径对刀口狭缝面上光强分布的影响,得到了积分棒尺寸与刀口狭缝面上照明视场的关系,为步进扫描投影光刻系统中积分棒的设计提供了依据·更多还原

【Abstract】 Based on geometric optics,the homogenizing principle of integrator rod was analyzed.Then the application of integrator rod in step-and-scan lithography systems was introduced.After that,the effect of NA of incident beam on the intensity distribution at blades plane was discussed and the relationship between the dimensions of integrator rod and the illumination field was obtained.The analysis above provided foundation for the design of integrator rod in step-and-scan lithography systems.更多还原