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基于自治与协调的半导体晶圆制造系统实时派工方法
Autonomy & Coordination-based Real-time Dispatching Methodology for Semiconductor Wafer Fabrication System
【摘要】 提出一种基于自治与协调的实时派工机制,并在此基础上研究面向瓶颈设备的实时派工算法,该算法针对瓶颈设备动态漂移的特性,根据不同的状态阈值采用不同的派工规则以进行控制。通过基于拓展型面向对象Petri网仿真平台的实验证明,该算法在绩效水平上优于其他两种算法。并且采用响应曲面法和期望函数对仿真结果进行优化,以获得更好的系统绩效。
【Abstract】 A novel autonomy & coordination-based real-time dispatching mechanism(A&C-RDM) is proposed in this paper.An A&C-RDM-based dynamic real-time bottleneck dispatching(DBD) algorithm is designed to detect bottlenecks in a timely way and make adaptive dispatching decisions according to the real-time conditions.Several simulation experiments are performed on extended object-oriented Petri net platform,and the results show that the A&C-DBD algorithm is superior to the other two methods on system performance.Response surface methodology and desirability function are used to optimize simulation for better system performance.
【Key words】 autonomy & coordination; real-time dispatching mechanism; dynamic bottleneck dispatching algorithm; response surface methodology;
- 【文献出处】 工业工程与管理 ,Industrial Engineering and Management , 编辑部邮箱 ,2006年06期
- 【分类号】TN305
- 【被引频次】2
- 【下载频次】228