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二维方型位置敏感探测器线性度的研究
Linearity analysis of two-dimensional quadrate position sensitive detector
【摘要】 研讨位置敏感探测器(PSD)的线性度问题,对影响二维方型结构PSD的线性度的三种因素,即边框区电阻率,负载电阻以及分流电阻的均匀分布进行模拟仿真实验研究,得到了相应的电流—位置图,并对其进行了分析,得出边框电阻和负载电阻越小,分流面电阻越均匀,从而线性度越好,位置误差也越小的结论,为进一步提高二维方型结构PSD的线性度提供了途径。
【Abstract】 In this paper,the linearity of the position sensitive detector(PSD) is discussed.There are three factors,which are the resistance in the ring,the resistance in the load and equality of the surface resistance,affecting the linearity of the position sensitive detector.Through the study of the simulation experiment to three factors,we can obtain respective plot of relation of current and position,and draw an important conclusion beyond the analysis of the plot that the linearity is better with the resistance in the ring and in the load is lower and the sheet resistance of PSD is more uniform,which presents a method to improve the linearity of the PSD.
【Key words】 position sensitive detector(PSD); linearity; position error; RC model; simulation;
- 【文献出处】 光学仪器 ,Optical Instruments , 编辑部邮箱 ,2006年06期
- 【分类号】TP21
- 【被引频次】2
- 【下载频次】145