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聚酰亚胺自支撑膜的制备及其表面形貌

Preparation and characterization of polyimide freestanding films

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【作者】 王勇吴永刚戚同非田国勋焦宏飞张莉

【Author】 WANG Yong,WU Yong-gang,QI Tong-fei,TIAN Guo-xun,JIAO Hong-fei,ZHANG Li(Pohl Institute of Solid State Physics,Institute of Precise Optical Engineering and Technology,Tongji University,Shanghai 200092,China)

【机构】 同济大学波耳固体物理研究所精密光学工程技术研究所同济大学波耳固体物理研究所精密光学工程技术研究所 上海200092上海200092

【摘要】 采用物理气相沉积法,在加热或不加热的抛光玻璃基片上蒸镀N aC l脱膜剂,再混合蒸镀均苯四甲酸二酐(PMDA)和二氨基二苯醚(ODA)两种单体,然后在空气环境中对样品进行热亚胺化。在去离子水中脱膜后获得厚度为100nm的聚酰亚胺自支撑膜。采用傅里叶变换红外光谱仪(FT IR)对样品进行化学结构分析并且根据谱线计算了不同热处理下薄膜的亚胺化程度。采用原子力显微镜,对样品进行表面形貌分析,结果表明给基片加热能改善聚酰亚胺薄膜的表面形貌。

【Abstract】 Physics vapor deposition was used to prepare freestanding polyimide films.NaCl was first deposited onto glass substrate and then pyromellitic dianhydride(PMDA) and 4,4′-diammodiphenyl ether(ODA) monomers were co-evaporated onto it.After heat treatment in ambient environment,the freestanding films of 100nm thickness were taken off the substrate in de-ionized water.The chemical structure of the freestanding films was investigated with FTIR spectroscopy and the degree of imidization was calculated.The surface morphology of the heated and unheated-substrate films was observed by using AFM method,results show that heating substrate can improve it.

【基金】 国家高技术863课题资助项目(804-7-5)
  • 【文献出处】 光学仪器 ,Optical Instruments , 编辑部邮箱 ,2006年02期
  • 【分类号】TQ317
  • 【下载频次】276
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