【摘要】 用化学气相沉积法在浮法玻璃上制备了复合薄膜。用台阶仪、纳米压痕和X射线衍射分别测定了薄膜厚度、弹性模量、纳米硬度和室温时薄膜的残余应力。实验结果表明:薄膜厚度为560.7nm,弹性模量为48.33GPa,纳米硬度值为10.65GPa,计算得到薄膜的残余应力值为-0.19GPa。对膜厚、气体的配比、流量、玻璃板的厚度、玻璃基体的化学成分等因素对薄膜残余应力的影响进行了讨论。更多还原

【Abstract】 Composite film was prepared by on-line chemical vapor deposition on float glass.The film thickness,elastic modulus,nano-hardness and residual stress at room temperature were investigated by stepmeter,nano-indentation and X-ray diffraction.The experimental results show that the thickness of the composite film is 560.7 nm,its elastic modulus is 48.33 GPa,and its nano-hardness is 10.65 GPa.The calculated value of the residual stress is-0.19 GPa.The effect of film thickness,quantity and proportion of precursor gases,thickness and chemical composition of glass substrate on the residual stress of the thin film was discussed.更多还原