【摘要】 通过对K9玻璃增透膜和偏振片的1064 nm激光损伤试验,显示激光透射元件激光损伤的一个显著特点是形成针孔损伤,其大小在10～50μm之间,分布呈分离状,其损伤深达基片表层及亚表层,与高反膜的激光损伤形态区别明显。K9和增透膜的孔洞损伤形成于后表面,偏振片形成于膜面,在一定的能量范围内,如能量提高1～2倍,激光能量与孔洞损伤的大小关联不大,只是孔洞的数量增加。孔洞的形成是由激光形成的驻波场引起的,并与基片表面及亚表面的损伤缺陷有关。更多还原

【Abstract】 The laser damage of transmission optics used in high power Nd:YAG laser was studied by use of Nd:YAG damage testing system,the damage experiment was taken by 1-on-1 damage measurement and the damage morphology was observed by 200×Normaski microscope.The wavelength of damage laser is 1064 nm and the duration of pulse is 10 ns.The experi- ment result shows that the damage morphology of transmission optics such as AR coatings and polarizer has the same damage shape-pinhole,which is a notable different from that of HR coatings.The pinhole is round with diameter 10～50μm,sepa- rated on the damage area of coatings and deep to the surface and sub-surface of the substrate.Specially,the damage pinhole exhibits on the rear surface of AR coatings and on the front surface of the polarizer respectively.On certain range of the laser energy density,the density improvement doesn’t raise the size of the pinhole,just only raise the number of the pinhole.We think the pinhole is mainly induced by the defects and standing wave formed by laser near the both surface of the substrate.更多还原