【摘要】 微材料力学性能测试是微机电系统设计制造过程中的重要环节,需要对低电平微弱信号进行高精度测量。应用平面三连杆机构和压电陶瓷实现精确的微位移和载荷的加载,采用低噪声高精度的∑-△型模数转换器AD7714,解决高精度测量的设计难题。分析AD7714的软硬件设计,总结AD7714的应用要点和系统的标定方法,为精确计量领域面临的高精度测量提供了有效解决途径。更多还原

【Abstract】 Micro material mechanical performance test is a fundamentality of design and manufacture for MEMS, high-accuracy measurement of weak signal is needed. Applying a kind of 3-DOF planar parallel manipulator with piezoelectricity ceramics for accurate micro displacement and load, a solution based on low noise and high-accuracy AD7714 is given to solve the design problems of high-accuracy measurement. How to design hardware and software is analyzed,the application key and system calibrating of AD7714 are summarized, It is an effective means for weak signal high-accuracy measurement in the field of precise measurement.更多还原