【摘要】 离子注入是获得金刚石N型或P型导电材料的有效途径之一。然而,离子注入对金刚石的晶格结构有破坏作用,造成金刚石薄膜体积的膨胀。本文对B离子注入合成Ib型金刚石薄膜后体积膨胀现象进行了研究,分析了引起体积膨胀的可能因素及原因。更多还原

【Abstract】 Ion implantation is one of available methods to gain N-type or P-type doped diamond materials.However,it may destroy the crystal lattices and cause volume expansion in diamond films.In this paper,the volume expansion in B ion implanted Ib type diamond has been studied and the origin has been analyzed.更多还原