【摘要】 从经典的成核长大理论出发,建立了STO铁电薄膜的晶化动力学模型,根据模型模拟了热处理温度以及升温速率对STO铁电薄膜微结构的影响。模拟计算结果表明,在热处理温度较低的情况下,薄膜的晶粒较大,晶粒尺寸分布也较宽。随着晶化温度的升高,晶粒生长受到抑制,晶粒较小。当升温速率较小时,晶粒生长充分、晶粒较大,但晶粒大小分布不均匀。当升温速率较大时,薄膜晶粒大小分布均匀,晶粒较小。模拟计算结果与实际情况一致。更多还原

【Abstract】 According to classic theory of crystalline nucleus formation and growth,crystal dynamics model of STO ferroelectric films was studied.Then,the influences of annealing temperature and its increasing rate on the microstructures of STO films were calculated by this model.The results show that STO film grain size is larger and has wide distribution at lower annealing temperature.However,with the increase of annealing temperature to some extent,crystalline nucleus formation ratio increase greatly.The increase of grain size is compressed,which results in smaller grain size.When annealing temperature increasing rate is lower,crystal growth is sufficient,which results in larger grain size.But grain size distribution is wide.At higher annealing temperature ascending rate,grain size is smaller and the grain size distribution is narrow.These simulation results are consistent with our experiments.更多还原