【摘要】 以羟基羧酸作为配位剂与金属离子配位,以乙二醇为交联剂促进聚合反应并以碳酸盐为反应原料,采用前躯体凝胶法在水溶液中制备铌酸锶钡(SrxBa1-xNb2O6,SBN)前驱体溶胶。将此溶胶在预热的Si/SiO2/Ti/Pt基片上旋转涂膜得到了平整均匀的SBN铁电薄膜。研究了pH值、乙二醇(EG)/柠檬酸(CA)(质量比)、热处理温度对SBN凝胶相组成、相结构以及SBN薄膜形貌的影响规律。结果表明当pH≥7且EG∶CA=60∶40时,可以获得稳定性良好的溶胶。对SBN薄膜热处理和红外光谱分析表明:随温度升高,SBN相衍射峰逐渐增强,晶型转变明显。同时COO-基团也逐渐消失,Sr—O、Ba—O和Nb—O峰显著增强。在800℃时,可得到单一钨青铜相的铌酸锶钡;SBN薄膜的SEM微观组织表明在750℃退火条件下可以获得晶粒为纳米级的表面均匀、无裂纹的SBN薄膜。更多还原

【Abstract】 Sr_xBa_1-xNb₂O₆（SBN） thin films have been prepared with citric acid,metal nitrate,metal carbonate and ethylene glycol as source materials by aqueous precusor gel.SBN thin films were prepared on a annealed Si/SiO₂/Ti/Pt substrate with the SBN gels.The effects of pH value,the mass ratio of EG/CA,heating temperature on the phase constitution,phase structure and the microstructural morphology of SBN thin films have been investigated.The results showed that a homogeneous Sr-Ba-Nb precursor sol was formed at CA∶EG=40∶60 and pH≥7.Also the analysis of heating treatment and infra-red spectrum（IR） revealed that the SBN peak increased as well as the peak of Sr—O,Ba—O and Nb—O by IR with the temperature increased,which showed that the COO^-base had gradually disappeared.Tetragonal tungsten bronze-type structural SBN phase can been obtained at 800℃.The SEM analysis showed the SBN thin film achieved at 750℃ was smooth and crack-free,moverover the grains had a level of nanometer.更多还原