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热光可调谐Si基聚合物列阵波导光栅
Thermo-optical Tunable Polymer/Si Arrayed Waveguide Gratings
【摘要】 报道了用五氟苯乙烯共聚甲基丙烯酸环氧丙酯(PFS-co-GMA)的聚合物材料制备的33×33信道热光(TO)可调谐的阵列波导光栅(AWG)。给出了器件的制作工艺流程和测试结果。测得器件的波长间隔为0.81nm,3dB带宽为0.35nm,串扰约为-20dB,中心输出信道和边缘输出信道的插入损耗分别为10.4dB和11.9dB,TO可调谐值为-0.12nm/K,在温度为10~65℃时的器件工作中心波长为1545.21~1551.81nm,调谐范围为6.6nm。
【Abstract】 A 33×33 channels thermo-optical(TO) tunable arrayed waveguide grating(AWG) has been fabricated using the poly (2,3,4,5,6-pentafluorostyrene-co-glycidylmethacrylate)(PFS-co-GMA).The technology process of the device is described,and the measured results are presented.The measured wavelength channel spacing is about 0.81 nm,3 dB bandwidth is about 0.35 nm,the crosstalk is about -20 dB,and the insertion loss is between 10.4 dB for the centre port and 11.9 dB for the edge ports.The measured TO tunable shift is about -0.12 nm/K .The measured center wavelength is 1 545.21~ 1 551.81 nm in the temperature range from 10 ℃ to 65 ℃,and the tuning range is 6.6 nm.
【Key words】 polymer; arrayed waveguide grating(AWG); transmission spectrum; insertion loss; crosstalk; thermo-optical(TO) tuning;
- 【文献出处】 光电子·激光 ,Journal of Optoelectronics.laser , 编辑部邮箱 ,2006年08期
- 【分类号】TN253
- 【被引频次】2
- 【下载频次】112